Automate Your Microscopy Workflows with CorrMeas
CorrMeas is a powerful software platform designed to streamline and automate microscopy workflows from precise stage navigation and multi-modality image acquisition to intelligent image analysis and reporting. Whether you're working with Scanning Electron Microscopes (SEM), light microscopy, or integrating multiple modalities, CorrMeas helps you reduce manual tasks, increase throughput, and achieve reproducible results, typically at lower costs than comparable solutions.
- Coordinate-Synchronized Imaging: Automatically align and capture images across different microscopes and sessions.
- Visual and Tabular Workflow Control: Manage samples, defects, and imaging parameters with intuitive graphical and tabular interfaces.
- Automated Image Processing: Apply custom filters, normalize images, and extract measurements with repeatable scripts.
- Integrated Support for SEM, AFM & Light Microscopy: Compatible with ZEISS SEM and other systems for seamless operation.
Ready to transform your microscopy process?
Request a Demo through our contact formular Look at our tutorials to see CorrMeas in action.
Proven and Trusted by Industry Leaders
CorrMeas has been quietly enabling advanced microscopy automation for over a decade. Initially marketed only through the ZEISS sales network, it has been successfully deployed in numerous industrial analysis labs, particularly within the semiconductor sector. Originally developed with a focus on defect review, CorrMeas quickly evolved with a broad set of features to support critical dimension measurements and intuitive workflow creation - even without programming skills. Rather than targeting the research segment, CorrMeas was built to meet the demanding needs of industrial environments - where reliability, speed, precision, and the ability to adapt to each local setup are critical. Fully compatible with ZEISS SEMs and light microscopes, CorrMeas offers a future-proof platform that delivers exactly what professionals in demanding environments expect.
Visual Navigation & Coordinate Control
CorrMeas offers a combined graphical and tabular view of all sample positions and acquired images. With background images, GDS files or KLARF files, users can navigate samples precisely and intuitively.
- Live SEM overlay with crosshair tracking
- Manual or automated coordinate alignment
- One-click defect targeting and labeling
The image above shows a loaded GDSII file in the basckground with several captured SEM images overlaying the GDS structure.
Image Acquisition & Device Integration
CorrMeas supports all ZEISS scanning electron microscopes and ZEISS Axio Imager Light Microscopes, ScanTool for AFMs (DME), and any DirectShow or Windows Media Foundation image sources with motorized stages. It automates imaging, focusing, stage movement with high precision and supports automatic position finding.
- AFM, SEM und Light Microscope control, full API support for ZEISS SEMs
- Live view integration and image overlays
- Support for KLARF file import
- Highly reliable automatic focus and stigmator setting for SEM
- Automatic positioning utilizing reference images or GDS file shapes
- The system lets you interactively record automation steps
The image above shows two captured images which mismatch because of a normal stage positioning deviation. The CorrMeas built-in referencing functions can automatically correct for such errors.
Image Processing & Analysis
The built-in Image Filter Designer supports automated measurements such as feature width, line edge roughness, or shape detection via interactive filtering pipelines.
- Edge detection, thresholding, area detection
- Automated width & line roughness evaluation
- Script generator for automation integration
- Testing your filters on the live image
The image shows different image manipulation and analysis techniques in CorrMeas. Such techniques can be applied to the live image from the microscope in order to test dependency on parameters and robustness of results.
Tutorial Videos
Hardware Addons
CorrMeas can be combined with specialized hardware extensions to enable advanced automation workflows. This includes robotic modules for fully automated sample loading, positioning, and transfer between imaging systems. The flexible architecture allows integration with third-party control units, making CorrMeas ideal for custom automation in high-throughput or unattended environments.
This video shows a demo setup where autoloading of samples is implemented using additional hardware components for the SEM airlock, along with a collaborative robot for sample transfer.
Standard automation modules such as airlock interfaces are available, but in most cases, custom designs are required depending on the sample type, container format, and measurement process.
Feel free to contact us to discuss custom solutions. In addition to the software, we also offer specially designed hardware components for advanced automation needs.
Distribution
The software is distributed as a lightweight, standalone executable, eliminating the need for bulky software installations or external dependencies. This streamlined design ensures exceptional stability and resilience to system or driver updates - a key advantage in industrial microscopy environments. By avoiding interference with existing configurations, the risk of disrupting established microscope installations is minimized, making this solution especially well-suited for long-term deployment on dedicated systems.
CorrMeas comes with full startup support and tailored training to get you productive from day one. A DoubleFox engineer handles installation and adapts the automation to your specific needs - directly on-site and in close collaboration. Training is aligned with your focus areas to ensure relevance and impact. CorrMeas runs fully automated with minimal user expertise, yet offers powerful tools for experts to customize workflows and handle complex automation tasks with ease.
CorrMeas supports microscope systems from various manufacturers, ensuring broad compatibility and flexibility. However, thanks to the close cooperation between ZEISS Microscopy and DoubleFox, more advanced and complex automation scenarios can be efficiently addressed on ZEISS platforms. CorrMeas is available either directly from DoubleFox or through local ZEISS representatives.
For more information, please feel free to use our contact form to obtain more information. Also, our A.I. Corrmeas expert can answer your more explicit questions to this software, please use the link below.